TY  - BOOK
AU  - Jiang,Guomin
ED  - Auris Reference Editorial Board
TI  - Encyclopaedia of manufacturing techniques for microfabrication and nanotechnology
SN  - 9781781546994
PY  - 2015///
CY  - London, UK
PB  - Auris Reference
KW  - Manufacturing processes
KW  - Microfabrication
KW  - Nanotechnology
N1  - Includes bibliographical references and index; V.1: Fundamentals techniques in microfabrication and nanotechnology -- v.2: Microfabrication for industrial applications -- v.3: Emerging technologies in micro-nanotechnology products -- v.4: Micro and nanotechnology for space systems
ER  -