<?xml version="1.0" encoding="UTF-8"?>
<mods xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" version="3.1" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
  <titleInfo>
    <title>Handbook of crystal growth</title>
    <subTitle>thin films and epitaxy</subTitle>
  </titleInfo>
  <titleInfo type="alternative">
    <title>Thin films and epitaxy</title>
    <subTitle>basic techniques</subTitle>
  </titleInfo>
  <titleInfo type="alternative">
    <title>Thin films and epitaxy</title>
    <subTitle>materials, processes, and technology</subTitle>
  </titleInfo>
  <name type="personal">
    <namePart>Nishinga, Tatau</namePart>
  </name>
  <name type="personal">
    <namePart>Kuech, T. F.</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">ne</placeTerm>
    </place>
    <place>
      <placeTerm type="text">Amsterdam, The Netherlands</placeTerm>
    </place>
    <publisher>Elsevier</publisher>
    <dateIssued>2015</dateIssued>
    <edition>2nd ed.</edition>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>2 v. : ill. ; 24 cm.</extent>
  </physicalDescription>
  <tableOfContents>V. III, Part A. Thin films and epitaxy : basic techniques  -- V. III, Part B. Materials, processes, and technology</tableOfContents>
  <targetAudience authority="marctarget">specialized</targetAudience>
  <note type="statement of responsibility">editor-in-chief, Tatau Nishinga ; volume editor, Thomas F. Kuech</note>
  <note>Includes bibliographical references and index</note>
  <subject authority="lcsh">
    <topic>Crystal growth</topic>
    <topic>Handbooks, manuals, etc</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Thin films</topic>
    <topic>Handbooks, manuals, etc</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Epitaxy</topic>
    <topic>Handbooks, manuals, etc</topic>
  </subject>
  <relatedItem type="series">
    <titleInfo>
      <title>Handbook of crystal growth</title>
    </titleInfo>
  </relatedItem>
  <identifier type="isbn">9780444633040 (set)</identifier>
  <identifier type="isbn">9780444633392 (v. 3A)</identifier>
  <identifier type="isbn">9780444633385 (v. 3B)</identifier>
  <recordInfo>
    <recordContentSource authority="marcorg">UMP</recordContentSource>
    <recordCreationDate encoding="marc">150521</recordCreationDate>
    <recordChangeDate encoding="iso8601">20251117141349.0</recordChangeDate>
    <recordIdentifier source="KUKTEM">vtls000086841</recordIdentifier>
  </recordInfo>
</mods>
