Handbook of optical metrology :  principles and applications / 
edited by Toru Yoshizawa 
 - 2nd ed. 
 - Boca Raton :  CRC Press,  2015 
 - xiii, 905 p. :  ill. ;  26 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781466573598 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Optical measurements--Handbooks, manuals, etc.<br/>Metrology--Handbooks, manuals, etc.