TY  - BOOK
AU  - Yoshizawa,Tōru
TI  - Handbook of optical metrology: principles and applications 
SN  - 9781466573598
PY  - 2015///
CY  - Boca Raton
PB  - CRC Press
KW  - Optical measurements
KW  - Handbooks, manuals, etc
KW  - Metrology
N1  - Includes bibliographical references and index
ER  -