Lau, John H. text bibliography nyu New York McGraw-Hill c2010 2010 monographic eng

electronic resource

1 online resource (xxiii, 552 p.) : ill. Enabling technologies for advanced MEMS packaging -- Advanced MEMS wafer-level packaging -- Optical MEMS packaging : communications -- Optical MEMS packaging : bubble switch -- Optical MEMS : microbolometer packaging -- Bio-MEMS packaging -- Biosensor packaging -- Accelerometer packaging -- Radiofrequency MEMS switches -- RF MEMS tunable capacitors and tubable band-pass filters -- Advanced packaging of RF MEMS devices specialized John H. Lau ... [et al.] Description based on print version record Includes bibliographical references and index Mode of acceess : Internet Microelectromechanical systems Microelectronic packaging 9780071627924 (NetLibrary e-ISBN) 0071627928 (NetLibrary e-ISBN) 9780071741835 (McGraw-Hill e-ISBN) 0071741836 (McGraw-Hill e-ISBN) http://www.netlibrary.com.libraryumpsa.idm.oclc.org/urlapi.asp?action=summary&v=1&bookid=291511 http://www.netlibrary.com.libraryumpsa.idm.oclc.org/urlapi.asp?action=summary&v=1&bookid=291511 UMP 110110 20251117141416.0 vtls000050935