Bao, Minhang <br/><br/>
Analysis and design principles of MEMS devices / 
by Mihang Bao 
 - Amsterdam:  Elsevier,  2005 
 - xii, 312 p.:  ill.;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0444516166 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems