Microsystems mechanical design / 
edited by Francesco de Bona, Eniko T. Enikov 
 - New York :  SpringerWien,  2006 
 - 211 p. :  ill. ;  25 cm. 
 - International centre for mechanical sciences : courses and lectures ;  no. 478 .
<br/><br/><label>ISBN: </label>3211374531 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Micromechanics