00525nam a2200169 a 4500001001400000003000700014005001700021020001500038040000800053245008300061260003600144300002900180440008300209650001900292700002300311700002100334vtls000019259KUKTEM20251117142053.0  a3211374531  aUMP00aMicrosystems mechanical design /cedited by Francesco de Bona, Eniko T. Enikov  aNew York :bSpringerWien,c2006  a211 p. :bill. ;c25 cm. 0aInternational centre for mechanical sciences : courses and lectures ;vno. 478 0aMicromechanics1 ade Bona, Francesco1 aEnikov, Eniko T.