00797nam a2200217 a 4500 vtls000019259 KUKTEM 20251117142053.0 3211374531 201107131658 VLOAD 200908141022 VLOAD 200908140955 VLOAD 200908131515 VLOAD 200704051132 kam UMP QC176.8.M5 M53 2006 Microsystems mechanical design / edited by Francesco de Bona, Eniko T. Enikov New York : SpringerWien, 2006 211 p. : ill. ; 25 cm. International centre for mechanical sciences : courses and lectures ; no. 478 Micromechanics de Bona, Francesco Enikov, Eniko T. 0 0 lcc 0 0 10000 10000 2019-09-04 627.40 0 QC176.8.M5 M53 2006 0000021746 2019-09-04 00:00:00 1 627.40 2019-09-04 OPEN VIRTUA40 21815 21821 VTLSSORT0080*0200*0900*2450*2600*3000*4400*6500*7000*7001*9991