Santos, Hector J. De Los Introduction to microelectromechanical microwave systems / Hector J. De Los Santos - 2nd ed. - Norwood, MA: Artech House Publishers, 2004 - xiii, 221 p.: ill.; 24 cm. - Microelectromechanical systems series . Includes bibliographical references and index ISBN: 1580538711 Subjects--Topical Terms: Microwave devicesMicroelectromechanical systems