TY  - BOOK
AU  - Santos, Hector J. De Los
TI  - Introduction to microelectromechanical microwave systems
SN  - 1580538711
PY  - 2004///
CY  - Norwood, MA
PB  - Artech House Publishers
KW  - Microwave devices
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -