01781nam a2200217 a 4500001001400000003000700014005001700021008004100038020002200079040000800101100002000109245009300129246009200222260003400314300006500348502009200413504002500505520097900530650001901509650003501528vtls000052423KUKTEM20251114204446.0110329t2010    my a   f m    000 0 eng d  aTHE0006607(Local)  aUMP1 aYong, Chee Ping10aFeasible laser parameters in fabrication of MEMS structures on silicon /cYong Chee Ping3 aFeasible laser parameters in fabrication of MEMS structures on siliconh[computer file]  aKuantan, Pahang :bUMP,c2010  axvi, 42 p. :bill. (some col.) ;c30 cm. +e1 computer discs  aProject paper (Bachelor of Mechanical Engineering) -- Universiti Malaysia Pahang - 2010  aBibliography : p. 403 aThe technique of making MEMS structures are kept improving which from old fashion with high cost machine to very advanced one to save time and labor cost. In this report, laser machining of silicon using ND:YAG is  introduced. The main objectives are generating MEMS structures on silicon wafer by using laser micromachining and the effects of parameters of laser micromachining on silicon.STATISTICA is used to design and analyze the experiments. Two experimental sets: (1) laser processing with assist gas and (2)laser processing without assist gas were carried out. Basic feature of MEMS and micro spots were generated. The micro features were investigated under SEM. Experimental results were analyzed in STATISTICA. Analyzed results show that laser power is the most significant effect followed by pulse width and the assist gas on the micro feature size and particularly feature quality. It was found that laser processing without assist gas produce promising results. 0aMicromachining 0aMicroelectromechanical systems