02075nam a2200265 a 4500 vtls000052423 KUKTEM 20251114204446.0 110329t2010 my a f m 000 0 eng d THE0006607(Local) 201905161136 amirul 201110040956 Fida 201107140041 VLOAD 201103291041 ida 201103291027 ida UMP TJ1191.5 .Y66 2010 rs Bc. Yong, Chee Ping Feasible laser parameters in fabrication of MEMS structures on silicon / Yong Chee Ping Feasible laser parameters in fabrication of MEMS structures on silicon [computer file] Kuantan, Pahang : UMP, 2010 xvi, 42 p. : ill. (some col.) ; 30 cm. + 1 computer discs Project paper (Bachelor of Mechanical Engineering) -- Universiti Malaysia Pahang - 2010 Bibliography : p. 40 The technique of making MEMS structures are kept improving which from old fashion with high cost machine to very advanced one to save time and labor cost. In this report, laser machining of silicon using ND:YAG is introduced. The main objectives are generating MEMS structures on silicon wafer by using laser micromachining and the effects of parameters of laser micromachining on silicon.STATISTICA is used to design and analyze the experiments. Two experimental sets: (1) laser processing with assist gas and (2)laser processing without assist gas were carried out. Basic feature of MEMS and micro spots were generated. The micro features were investigated under SEM. Experimental results were analyzed in STATISTICA. Analyzed results show that laser power is the most significant effect followed by pulse width and the assist gas on the micro feature size and particularly feature quality. It was found that laser processing without assist gas produce promising results. Micromachining Microelectromechanical systems 0 0 0 1 20000 20000 2019-09-04 0 TJ1191.5 .Y66 2010 rs Bc. 0000054037 2019-09-04 00:00:00 1 2019-09-04 PSM 0 0 0 1 20000 20000 2019-09-04 0 CD 5034 | TJ1191.5 .Y66 2010 rs Bc. 0000054038 2019-09-04 00:00:00 1 2019-09-04 PSM VIRTUA40 2380 2386 VTLSSORT0080*0200*0400*0900*1000*2450*2460*2600*3000*5020*5040*5200*6500*6501*9992