02266nam a2200265 a 4500 vtls000052538 KUKTEM 20251114204446.0 110330t2010 my a f m 000 0 eng d THE0006582(Local) 201905161027 amirul 201110040950 Fida 201107140042 VLOAD 201103311137 ida 201103301704 ida UMP TJ1191 .L38 2010 rs Bc. Lau, Zhen Chyen Experimental laser-machining of silicon wafer / Lau Zhen Chyen Experimental laser-machining of silicon wafer [computer file] Kuantan, Pahang : UMP, 2010 xv, 85 p. : ill. (some col.) ; 30 cm. + 1 computer disc Project paper (Bachelor of Mechanical Engineering with Manufacturing Engineering) -- Universiti Malaysia Pahang - 2010 Bibliography : p. 52-54 This thesis deals with laser machining of silicon wafer at various process parameters. The objective of this thesis is to investigate the effect of laser machining parameters on the cut surface quality and determine the feasible laser machining parameters that can machine silicon wafer. The thesis describes how machining parameters and air assist gas affects cut surface quality. The silicon wafer was machined by laser with and without air assists. Principally, two experimental sets with different cutting speed and laser power were designed in statistical software. The kerf widths and quality were observed under microscopes. The results then were analyzed using statistica software. The analysis indicated that cutting speed has significant effect to the kerf width and laser cutting with air assists produced wider kerf. Result obtained also showed that laser cutting without air assists produced better cut surface quality. The feasible machining parameter of silicon is estimated at 1.0-2.0 mm/min for cutting velocity, 0.80-0.94 watt for laser power in laser cutting without air assist and 1.0-4.0 mm/min for cutting velocity, 0.80-0.90 watt for laser power in laser cutting with air assist. Laser beam cutting Machining 0 0 0 1 20000 20000 2019-09-04 0 TJ1191 .L38 2010 rs Bc. 0000054013 2019-09-04 00:00:00 1 2019-09-04 PSM 0 0 0 1 20000 20000 2019-09-04 0 CD 5022 | TJ1191 .L38 2010 rs Bc. 0000054014 2019-09-04 00:00:00 1 2019-09-04 PSM VIRTUA40 2397 2403 VTLSSORT0080*0200*0400*0900*1000*2450*2460*2600*3000*5020*5040*5200*6500*6501*9992