TY  - BOOK
AU  - Yasuda,Hirotsugu
TI  - Luminous chemical vapor deposition and interface engineering
SN  - 0824757882
PY  - 2005///
CY  - New York
PB  - Marcel Dekker
KW  - Plasma polymerization
KW  - Chemical vapor deposition
KW  - Surface chemistry
KW  - Chemical engineering
KW  - Research
N1  - Includes bibliographical references and index
ER  -