01011nam a2200265 a 4500 vtls000007809 KUKTEM 20251117142211.0 060606t2005 nyu f 001 0 eng d 0071455566 9780071455565 201207041438 asmadi 201207041437 asmadi 201107131728 VLOAD 200908251605 nadia 200606141135 VLOAD UMP TK7870.15 .G55 2005 Gilleo, Ken MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo New York : McGraw-Hill, 2005 xiii, 220 p. : ill. ; 24 cm. McGraw-Hill nanoscience and technology series Includes bibliographical references (p. 203-213) and index Microelectronic packaging Microelectromechanical systems Optoelectronic devices 0 0 0 0 20000 20000 2019-09-04 563.85 0 TK7870.15 .G55 2005 0000012064 2019-09-04 00:00:00 1 563.85 2019-09-04 OPEN VIRTUA40 24439 24445 VTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*4900*5040*6500*6501*6502*9992