TY  - BOOK
AU  - Hsu,Tai-Ran
TI  - MEMS packaging
SN  - 0863413358
PY  - 2004///
CY  - London: 
PB  -  Institution of Electrical Engineers
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
N1  - Includes index; Includes bibliographical references
ER  -