Fatikow, S. ((Sergej)) 1960- <br/><br/>
Microsystems technology and microrobotics / 
S. Fatikow, U. Rembold 
 - Berlin: New York:   Springer,   1997 
 - xii, 408 p.:   ill.;   24 cm. 
<br/><br/>Includes bibliographical references (p. [366]-401) and index 
<br/><br/><label>ISBN: </label>3540606580 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electromechanical devices--Design and construction<br/>Microfabrication<br/>Robotics