TY  - BOOK
AU  - Fatikow, S. ((Sergej)) 1960-
AU  - Rembold,Ulrich
TI  - Microsystems technology and microrobotics
SN  - 3540606580
PY  - 1997///
CY  - Berlin: New York
PB  -  Springer
KW  - Electromechanical devices
KW  - Design and construction
KW  - Microfabrication
KW  - Robotics
N1  - Includes bibliographical references (p. [366]-401) and index
ER  -