Sedky, Sherif <br/><br/>
Post-processing techniques for integrated MEMS / 
Sherif Sedky 
 - Boston:  Artech House,  2006 
 - xiv, 207p.:  ill.;  24cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>1580539017 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems