00505nam a2200169   4500001001400000003000700014005001700021008004100038020001500079040000800094100001800102245006700120260003300187300003000220504005000250650003500300vtls000009501KUKTEM20251117142302.0060606t2004    xxu    gr    |0 1 0|eng |  a1580539017  aUMP1 aSedky, Sherif10aPost-processing techniques for integrated MEMS /cSherif Sedky  aBoston:bArtech House,c2006  axiv, 207p.:bill.;c24cm.  aIncludes bibliographical references and index00aMicroelectromechanical systems