00789nam a2200217 4500 vtls000009501 KUKTEM 20251117142302.0 060606t2004 xxu gr |0 1 0|eng | 1580539017 201107131742 VLOAD 200908141117 VLOAD 200908141049 VLOAD 200908131548 VLOAD 200606141145 VLOAD UMP TK7875 .S42 2006 Sedky, Sherif Post-processing techniques for integrated MEMS / Sherif Sedky Boston: Artech House, 2006 xiv, 207p.: ill.; 24cm. Includes bibliographical references and index Microelectromechanical systems 0 0 lcc 0 0 20000 20000 2019-09-04 381.50 0 TK7875 .S42 2006 0000015087 2019-09-04 00:00:00 381.50 2019-09-04 OPEN VIRTUA 26167 26173 VTLSSORT0080*0200*0900*1000*2450*2600*3000*5040*6500*9490*9991