Liu, Chang <br/><br/>
Foundations of MEMS / 
Chang Liu 
 - 2nd ed. 
 - Upper Saddle River, N.J. :  Prentice Hall,  c2012 
 - xiv, 562 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780132497367 (alk. paper) 0132497360 (alk. paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems