00577nam a2200193 a 4500001001400000003000700014005001700021008004100038020003100079020002800110040000800138100001500146245003700161250001200198260005400210300003400264504005000298650003500348vtls000053711KUKTEM20251117142307.0110603t2012    njua   f b    001 0 eng d  a9780132497367 (alk. paper)  a0132497360 (alk. paper)  aUMP1 aLiu, Chang10aFoundations of MEMS /cChang Liu  a2nd ed.  aUpper Saddle River, N.J. :bPrentice Hall,cc2012  axiv, 562 p. :bill. ;c24 cm.  aIncludes bibliographical references and index 0aMicroelectromechanical systems