Elwenspoek, M. <br/><br/>
Silicon micromachining / 
M. Elwenspoek and H. V. Jansen 
 - Cambridge:   Cambridge University Press,   1998 
 - xiii, 405 p.:   ill; 25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0521607671 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon<br/>Micromachining<br/>Etching