TY  - BOOK
AU  - Elwenspoek, M.
AU  - Jansen,H.V.
TI  - Silicon micromachining
SN  - 0521607671
PY  - 1998///
CY  - Cambridge
PB  -  Cambridge University Press
KW  - Silicon
KW  - Micromachining
KW  - Etching
N1  - Includes bibliographical references and index
ER  -