SIMOX / 
edited by Maria J. Anc 
 - London :  Institution of Electrical Engineers,  2004 
 - xvi, 143 p. :  ill. ;  26 cm. 
 - Processing series; no. 4 .
 - Processing series; no. 4 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>086341334X 9780863413346 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon-on-insulator technology