TY  - BOOK
AU  - Anc,Maria J.
TI  - SIMOX
T2  - Processing series; no. 4
SN  - 086341334X
PY  - 2004///
CY  - London
PB  - Institution of Electrical Engineers
KW  - Silicon-on-insulator technology
N1  - Includes bibliographical references and index
ER  -