TY  - BOOK
AU  - Freund,L.B.
AU  - Suresh,S.
TI  - Thin film materials: stress, defect formation and surface evolution 
SN  - 0521822815
PY  - 2003///
CY  - Cambridge, England
PB  - Cambridge University Press
KW  - Thin films
N1  - Includes index; Bibliography: p. 713-737
ER  -