@book{28558,
	author = {Kockmann, Norbert},
	title = {Micro process engineering :},
	publisher = {Wiley-VCH ,},
	year = {c2006},
	address = {Weinheim :},
	url = {http://www.loc.gov/catdir/enhancements/fy0645/2006296404-t.html}
}