TY  - BOOK
AU  - Kockmann,Norbert
TI  - Micro process engineering: fundamentals, devices, fabrication, and applications 
SN  - 3527312463
PY  - 2006///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Production engineering
KW  - Microtechnology
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0645/2006296404-t.html
ER  -