Lobontiu, Nicolae

Mechanical design of microresonators : modeling and applications / Nicolae Lobontiu - New York : McGraw-Hill, c2006 - xiii, 342 p. : ill. ; 23 cm. - McGraw-Hill nanoscience and technology series .

Includes bibliographical references and index

0071455388 9780071455381


Microelectromechanical systems--Design and construction
Electric resonators--Design and construction
Vibrators--Design and construction
Detectors--Design and construction