TY  - BOOK
AU  - Lobontiu,Nicolae
TI  - Mechanical design of microresonators: modeling and applications 
SN  - 0071455388
PY  - 0000///McGraw-Hill,
PY  - 2006///
CY  - New York
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Electric resonators
KW  - Vibrators
KW  - Detectors
N1  - Includes bibliographical references and index
ER  -