Lyshevski, Sergey Edward <br/><br/>
MEMS and NEMS :  systems, devices, and structures / 
Sergey Edward Lyshevski 
 - Boca Raton :  CRC Press,  2002 
 - 461 p. :  ill. ;  24 cm 
 - Nano- and microscience, engineering, technology, and medicine series .
<br/><br/><label>ISBN: </label>0849312620 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems