Allen, James J. <br/><br/>
Micro electro mechanical system design / 
James J. Allen 
 - Boca Raton :  Taylor & Francis,  2005 
 - 465 p. :  ill. ;  23 cm. 
 - Mechanical engineering .
<br/><br/><label>ISBN: </label>0824758242 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction<br/>Engineering design