Liang, Hong <br/><br/>
Tribology in chemical-mechanical planarization / 
Hong Liang, David Craven 
 - Boca Raton, FL :  Taylor & Francis,  2005 
 - 185 p. :  ill. ;  25 cm. 
<br/><br/><label>ISBN: </label>0824725670 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Tribology<br/>Grinding and polishing