TY  - BOOK
AU  - Liang,Hong
AU  - Craven,David
TI  - Tribology in chemical-mechanical planarization
SN  - 0824725670
PY  - 2005///
CY  - Boca Raton, FL
PB  - Taylor & Francis
KW  - Tribology
KW  - Grinding and polishing
ER  -