MEMS :  design and fabrication / 
edited by Mohamed Gad-el-Hak 
 - 2nd ed. 
 - Boca Raton :  Taylor & Francis,  2006 
 - (various pagings) :  ill. ;  26 cm. 
 - Mechanical engineering series .
<br/><br/><label>ISBN: </label>0849391385 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Microfabrication