TY  - BOOK
AU  - Gad-El-Hak,Mohamed
TI  - MEMS: design and fabrication 
SN  - 0849391385
PY  - 2006///
CY  - Boca Raton
PB  - Taylor & Francis
KW  - Microelectromechanical systems
KW  - Microfabrication
ER  -