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  <titleInfo>
    <title>Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method</title>
  </titleInfo>
  <name type="personal">
    <namePart>Dayangku Noorfazidah Awang Sh'ri</namePart>
    <role>
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  <typeOfResource>text</typeOfResource>
  <genre authority="marc">theses</genre>
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    <place>
      <placeTerm type="text">Skudai, Johor]</placeTerm>
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    <publisher>UTM</publisher>
    <dateIssued>2009</dateIssued>
    <issuance>monographic</issuance>
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  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xvii, 109 p. : ill. ; 30 cm.</extent>
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  <targetAudience authority="marctarget">specialized</targetAudience>
  <note type="statement of responsibility">Dayangku Noorfazidah Awang Sh'ri</note>
  <note>Thesis (Master of Engineering (Mechanical-Materials) -- Universiti Teknologi Malaysia - 2009</note>
  <note>Bibliography : p. 101-106</note>
  <subject authority="lcsh">
    <topic>Surfaces (Technology)</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Diamond thin films</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Chemical vapor deposition</topic>
  </subject>
  <identifier type="isbn">THE0005770(Local)</identifier>
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    <recordCreationDate encoding="marc">120406</recordCreationDate>
    <recordChangeDate encoding="iso8601">20251114204514.0</recordChangeDate>
    <recordIdentifier source="KUKTEM">vtls000059166</recordIdentifier>
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