May, Gary S. <br/><br/>
Fundamentals of semiconductor manufacturing and process control / 
Gary S. May, Costas J. Spanos. 
 - Hoboken, N.J. :  Wiley-Interscience,  2006. 
 - 463 p. :  ill. ;  25 cm. 
<br/><br/><label>ISBN: </label>0471784060 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction<br/>Integrated circuits--Design and construction<br/>Process control--Statistical methods