00928nam a2200241 a 4500 vtls000016792 KUKTEM 20251117144228.0 061205t nju e 001 0 eng d 0471784060 201107131850 VLOAD 200908141246 VLOAD 200908141218 VLOAD 200908131643 VLOAD 200612051605 dilla UMP TK 7871.85 .M39 2006 May, Gary S. Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. Hoboken, N.J. : Wiley-Interscience, 2006. 463 p. : ill. ; 25 cm. Semiconductors Design and construction Integrated circuits Design and construction Process control Statistical methods Spanos, Costas J. 0 0 lcc 0 0 20000 20000 2019-09-04 438.20 0 TK 7871.85 .M39 2006 0000019627 2019-09-04 00:00:00 1 438.20 2019-09-04 OPEN VIRTUA40 31997 32003 VTLSSORT0080*0200*0900*1000*2450*2600*3000*6500*6501*6502*7000*9991