TY  - BOOK
AU  - Giannuzzi,Lucille A.
AU  - Stevie,Fred A.
TI  - Introduction to focused ion beams: instrumentation, theory, techniques, and practice 
SN  - OPE0001026(Local)
PY  - 2005///
CY  - New York
PB  - Springer
KW  - Focused ion beams
N1  - Includes bibliographical references and index
ER  -