Silicide technology for integrated circuits / 
edited by Lih J. Chen 
 - London :  Instiyution of Electrical Engineers,  2004 
 - 279 p. :  ill. ;  26 cm. 
 - IEE processing series ;  5 .
<br/><br/><label>ISBN: </label>0863413528 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicides<br/>Integrated circuits--Materials