Scientific wet process technology for innovative LSI/FPD manufacturing / 
edited by Tadahiro Ohmi 
 - Boca Raton :  Taylor & Francis,  2006 
 - 386 p. :  ill. ;  26 cm. 
<br/><br/><label>ISBN: </label>0849335434 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction<br/>Semiconductors--Cleaning<br/>Integrated circuits--Design and construction