TY  - BOOK
AU  - Ohmi,Tadahiro
TI  - Scientific wet process technology for innovative LSI/FPD manufacturing
SN  - 0849335434
PY  - 2006///
CY  - Boca Raton
PB  - Taylor & Francis
KW  - Semiconductors
KW  - Design and construction
KW  - Cleaning
KW  - Integrated circuits
ER  -