Microsystems technology :  fabrication, test & reliability / edited by Jumana Boussey 

 - Sterling, VA :  Kogan Page Science,  2003 
 - 295 p. :  ill. ;  25 cm. 
<br/><br/><label>ISBN: </label>1903996473 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems