TY  - BOOK
AU  - Boussey,Jumana
TI  - Microsystems technology: fabrication, test & reliability / edited by Jumana Boussey
SN  - 1903996473
PY  - 2003///
CY  - Sterling, VA
PB  - Kogan Page Science
KW  - Microelectromechanical systems
ER  -