@book{32907,
	author = {Jackson, Mark J.},
	title = {Microfabrication and nanomanufacturing /},
	publisher = {CRC/Taylor & Francis,},
	year = {2006},
	address = {Boca Raton, FL :},
	url = {http://www.loc.gov/catdir/enhancements/fy0703/2005049275-d.html}
}