Microfabrication and nanomanufacturing / 
edited by Mark J. Jackson. 
 - Boca Raton, FL :  CRC/Taylor & Francis,  2006 
 - 401 p. :  ill. ;  27 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0824724313 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Integrated circuits--Design and construction<br/>Microelectromechanical systems--Design and construction